潔淨度別
塵粒允許數/立方米
塵粒允許數/2.83升
≥0.5μm
≥5μm
100
3,520
29
10
0
1000
35,200
293
10,000
352,000
2,930
996
8
100,000
3,520,000
29,300
9,962
83
300,000
10,560,000
87,900
29,885
249
1000,000
35,200,000
293,000
99,616
829